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2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 1 of 10 36 thornwood drive approved by date ithaca, new york 14850 prod. mgr. j. bergstrom 8/6/07 tel: 607 - 257 - 1080 test mgr. j. chong 8/6/07 fax: 607 - 257 - 1146 vp eng. t. davis 8/6/07 www.kionix.com ecn # pcn # rev pg # revision description date rev'd by - initial release 8/6/07 09-171 09-171 a update tables to add special characteristics. adjusted current tolerances. 10/19/09 j. bergstrom "kionix" is a registered trademark of kionix, inc. products described herein are protected by patents issued or pending. no license is granted by implication or otherwise under any patent or other rights of kionix. the information contained herein is believed to be accurate and reliable but is not guaranteed. kionix does not assume responsibility for its use or distribution. kionix also reser ves the right to change product specifications or discontinue this product at any time without prior notice. this publication supersedes and replaces all information previously supplied. ? 2007 kionix, inc. ? all rights reserved
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 2 of 10 product description the kxr94 - 2050 is a tri - axis, silicon micromachined accelerometer with a full - scale output range of 2g (19.6m/s 2 ). the sense element is fabricated using kionix?s proprietary plasma micromachining process technology. acceleration sens ing is based on the principle of a differential capacitance arising from acceleration - induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. the sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. a separate asic device packaged with the sense element provides signal conditioning and self - test. the accelerometer is deliver ed in a 5 x 5 x 1.2 mm dfn plastic package operating from a 2.5 ? 5.25v dc supply. the three outputs (x, y, z) are provided on three analog output pins. the kxr94 also features an integrated 4 - channel multiplexer (x, y, z, aux in). the enable pin must be high for normal operation and low for power shutdown. functional diagram c 2 c 3 32k x sensor charge amplifier oscillator 10 2 self test output x enable vdd gnd 3 8 gnd 12 y sensor charge amplifier 32k output y z sensor charge amplifier 32k output z 13 vmux 5 aux in 9 nc s 0 s 1 4 6 7 11 logic c 4 1 khz lpf temp sensor mux 14
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 3 of 10 product specifications table 1. mechanical (specifications are for operation at v dd = 3.3 v and t = 25o c unless stated otherwise) parameters units min typical max operating temperature range o c -40 - 85 zero - g offset ! v 1.600 1.650 1.700 zero - g offset variation from rt over temp. mg/ o c 0.2 sensitivity ! mv/g 647 660 673 sensitivity variation from rt over temp. %/ o c 0.01 (xy) 0.02 (z) offset ratiometric error (v dd = 3.3v 5%) mg 4 sensitivity ratiometric error (v dd = 3.3v 5%) % 1.25 (xy) 0.20 (z) non - linearity % of fs 0.1 cross axis sensitivity % 2.0 self test output change on activatio n g 1.9 (xy) 0.5 (z) bandwidth ( - 3db) 1 hz 800 noise density (on filter pins) g / hz 45 ! special characteristics notes: 1. internal 1 khz low pass filter. lower frequencies are user definable with external capacitors. table 2. electrical (specifications are for operation at v dd = 3.3 v and t = 25o c unle ss stated otherwise) parameters units min typical max supply voltage (v dd ) operating v 2.5 3.3 5.25 current consumption operating 1 ! ma 0.8 1.03 1.25 standby a - - 5 analog output resistance(r out ) k ? 24 32 40 input low voltage v - - 0.2 * v io input high voltage v 0.8 * v io - - multiplexer response time s 4.5 power up time 2 ms 1 ! special characteristics notes: 1. tolerances for operating current are for vdd=3.3v 2. power up time can also be determined by 5 times the rc t ime constant of the optional user defined low pass filter.
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 4 of 10 table 3. environmental parameters units min target max supply voltage (v dd ) absolute limits v - 0.3 - 7.0 maximum operating temperature range o c -40 - 125 storage temperature range o c -55 - 150 mech. shock (powered and unpowered) g - - 5000 for 0.5ms esd hbm v - - 3000 caution: esd sensitive and mechanical shock sensitive component, improper handling can cause permanent damage to the device. the lga plastic package conforms to european union directive 2002/95/ec on the restriction of the use of certain hazardous substances in electrical and electronic equipment (rohs). soldering soldering recommendations available upon request or from www.kionix.com .
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 5 of 10 application schematic c 4 14 13 12 11 10 9 8 1 2 3 4 5 6 7 c 2 c 3 kxr 94 vdd c 1 vmux s 0 s 1 st enable x z y aux in table 4. kxr94 pad descriptions pad name description 1 nc not connected internally (can be connected to vdd or gnd) 2 x output analog output of the x - channel. optionally, a c apacitor (c 2 ) placed between this pin and ground will form a low pass filter. 3 gnd ground 4 aux in auxiliary input for multiplexer. connect to vdd or ground if not used. 5 vmux multiplexed analog output. do not connect if multiplexer is not used. 6 s0 mux selector 0 (see output select table). connect to vdd or ground if not used. 7 s1 mux selector 1 (see output select table). connect to vdd or ground if not used. 8 vdd the power supply input. decouple this pin to ground with a 0.1uf ceramic cap acitor (c 1 ). 9 enable enable: high - normal operation; low - device is in standby, power down mode 10 st self test: low ? normal operation; high ? device is in self - test mode 11 nc not connected internally (can be connected to vdd or gnd) 12 gnd groun d 13 y output analog output of y - channel. optionally, a capacitor (c 3 )placed between this pin and ground will form a low pass filter. 14 z output analog output of z - channel. optionally, a capacitor (c 4 ) placed between this pin and ground will form a low pass filter. center pad ground
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 6 of 10 application design equations 1. the bandwidth is determined by the internal 1khz low pass filter. the user can lower the bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. the response i s single pole. given a desired bandwidth, f bw , the filter capacitors are determined by: bw f x c c c 6 4 3 2 10 97 . 4 ? = = = 2. when using not using the multiplexer, the kxr94 is a pin - compatible replacement for kionix?s kxm52 series of accelerometers. the following application schematic should be used: pin 4 (aux in) = ground pin 5 (vmux) = do not connect pin 6 (s0) = ground pin 7 (s1) = ground c 4 14 13 12 11 10 9 8 1 2 3 4 5 6 7 c 2 c 3 kxr 94 vdd c 1 st enable x y z 3. when not connecting the self test pin to a digital i/o port of a microc ontroller, kionix recommends connecting the self test pin to ground.
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 7 of 10 using the multiplexed output of the kxr94 multiplexer data select the kxr94 features an integrated 4 - channel multiplexer. this feature reduces system mcu requirements to only 1 adc and 2 digital i/o?s. the kxr94 uses two select inputs (s0, s1) to control the data flow from vmux. when a microprocessor toggles the select inputs, the desired output is attained based on the select table. note that logic 0 is gnd and logic 1 is vdd. output select table data sampling rate when operating in its multiplexed mode, the kxr94 has the ability to achieve very high data sampling rates. internally, the sensor elements (x, y, and z) are sequentially sampled in a ?round robin? fashion at a rate of 32khz per axis. note that this is a differential capacitance sampling of each sensor element, which stores an analog voltage on the filter cap for each axis. combine this high sensor e lement sampling rate with the short 5s settling time of the integrated multiplexer, and the user can achieve a performance very close to that of the 3 separate analog outputs. this is more than sufficient to eliminate any aliasing in the final application since the kxr94 will be operating with a typical bandwidth of ~50hz and a maximum of 1000hz. s1 s0 vmux 0 0 x output 0 1 z output 1 0 y output 1 1 aux. in
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 8 of 10 test speci fications ! special characteristics: these characteristics have been identified as being critical to the customer. every part is tested to verify its conformance to specification prior to shipment. table 5. test specifications parameter specificat ion test conditions zero - g offset @ rt 1.650 0.050 v 25o c, v dd = 3.3v sensitivity @ rt 660 13 mv/g 25o c, v dd = 3.3v current consumption operating 0.5 <= i dd <= 1.4 ma 25o c, v dd = 3.3v
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 9 of 10 +x +x +y +z +z package dimensions and orientation 5 x 5 x 1.2 mm dfn all dimensions and tolerances conform to asme y14.5m - 1994 when device is accelerated in +x, +y or +z direction, the corresponding output will increase. d imension mm inch min nom max min nom max a 5.00 0.197 b 5.00 0.197 c 1.10 1.20 1.30 0.043 0.047 0.051 d 0.18 0.23 0.28 0.007 0.009 0.011 e 0.50 0.020 f 0.35 0.40 0.45 0.014 0.016 0.018 g 3.50 3.60 3.70 0.138 0.142 0.146 h 4.20 4.30 4.40 0.165 0.169 0.173
2g tri - axis accelerometer specifications part number: kxr94 - 2050 rev. a oct 09 page 10 of 10 static x/y/z output response versus orientation to earth?s surfac e (1g): position 1 2 3 4 5 6 diagram top bottom bottom top x 1.65 v 2.31 v 1.65 v 0.99 v 1.65 v 1.65 v y 2.31 v 1.65 v 0.99 v 1.65 v 1.65 v 1.65 v z 1.65 v 1.65 v 1.65 v 1.65 v 2.31 v 0.99 v x - polarity 0 + 0 - 0 0 y - polarity + 0 - 0 0 0 z - polarity 0 0 0 0 + - (1g) earth?s surface
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